MEMS three dimensional Lorentz force magnetometer with innovative multiaxial operating principle and novel readout (3DLKM)

Research object of the project is the development of a triaxially sensitive MEMS magnetic field sensor, based on an innovative measuring principle in combination with a novel readout. Focused is thereby the performance with respect to linearity and magnetic hysteresis, while at the same time a small size and low production costs are being aimed at.

The research project has two main topics, firstly the design of the MEMS sensor element and secondly the development of the matching evaluation electronics. The goal is to provide a proof-of-concept for MEMS-integrated Lorentz-Force-Magnetometer.

Work priorities concerning development of MEMS sensor element:

  • Element design (analytically, FEM)
  • Waferlayout
  • Mikrotechnological processing, assembly and packaging
  • Assembly, verification and testing of the measuring environment
  • Verification and testing

Work priorities concerning development of electronics:

  • Design evaluation electronics
  • Verification of sensor elements in conjunction with readout electronics on lab-level
  • Assembly of functional model
  • Validation of functional model


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Sponsor: AiF - Arbeitsgemeinschaft industrieller Forschungsvereinigungen "Otto von Guericke" e.V., IGF, Federal Ministry for Economic Affairs and Energy
Funding Number: 18631 N
Duration: 01.08.2016 to 31.07.2019
Cooperation Partner: Fritz Huettinger Chair of Microelectronics at the Department of Microsystems Engineering (IMTEK) of the University of Freiburg
Maturity Level: Research > Research pattern


M.Sc. Helena Biegler
Phone: +49 7721 943-154